‘Nano-chip’ chipmaking products announced
July 17, 2001 | Source: Semiconductor Business News
“Nano-chip” chipmaking products were announced at the Semicon West trade show by Applied Materials.
The new products will enable the development of advanced chips with design rules of 100-nm (0.10-micron) and below. They include new process module technologies and an atomic layer deposition chamber for its chemical vapor deposition equipment.