‘Nano-chip’ chipmaking products announced

July 17, 2001 | Source: Semiconductor Business News

“Nano-chip” chipmaking products were announced at the Semicon West trade show by Applied Materials.

The new products will enable the development of advanced chips with design rules of 100-nm (0.10-micron) and below. They include new process module technologies and an atomic layer deposition chamber for its chemical vapor deposition equipment.