Super-Resolution X-ray Microscopy unveils the buried secrets of the nanoworld

July 21, 2008 | Source: PhysOrg.com

A novel super-resolution X-ray microscope developed by Paul Scherrer Institut and EPFL researchers combines the high penetration power of x-rays with high spatial resolution with raster scanning, making it possible to non-destructively view the detailed interior composition of sub-hundred-nanometer semiconductor devices or biological samples without requiring a vacuum.